CMD30 FisMat2023 - Submission - View

Abstract title: Electrothermally tunable metal-graphene-siliconnitride membrane mechanical device
Submitting author: Mengqi Fu
Affiliation: Fachbereich Physik, Universität Konstanz
Affiliation Address: Universitätsstraße 10, 78457 Konstanz
Country: Germany
Other authors and affiliations: Fan Yang (Fachbereich Physik, Universität Konstanz), Elke Scheer (Fachbereich Physik, Universität Konstanz)
Abstract
Controlling the properties of mechanical devices over a large range is interesting for many applications such as filters and sensors as well as for fundamental research such as nonlinear dynamics, optomechanics and quantum readout. In this work, we demonstrate a novel on-chip tuning structure of mechanical properties on a suspended silicon-nitride (SiN) membrane having side length around 500 μm and covered with graphene and metal electrodes. The developed tuning concept relies on the force induced by the thermal expansion difference between the metallic leads and the SiN membrane. Through the developed structure, we realize an extreme large spatial deflection (more than 1 μm in the out-of-plane direction), large eigenfrequency tuning (more than 50 %) of the vibration mode and symmetry breaking of the membrane. We discuss an analytic model that quantitatively describes the loading power needed to induce spatial deflection and the curvature of the spatial deflection without any free parameter. In addition, by injecting an alternating voltage to the graphene-metal electrode, we achieve an on-chip excitation of the membrane resonator as well as nonlinear parameter manipulation which paves the way to investigate the nonlinear dynamics of multidimensional and composite nanomechanical resonators.